PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)

PMN-PT (lead magnesium niobate-lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)

In the attempt to find the appropriate micromanufacturing technology of PMN-PT (lead magnesium niobate–lead titanate) piezo material, whose MEMS-related applications look promising, two methods are investigated: excimer laser ablation (using KrF gas) and inductively coupled plasma (ICP) dry etching, also known as DRIE (using Ar/C4F8 gases). The paper quantitatively reports the optimal parameter...

Excimer laser microfabrication and micromachining

Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...

Dry Etching Based Silicon Micromachining

The aim of this work is to demonstrate the “dry” etching based micro-fabrication technologies in the manufacturing of Single Crystal Silicon (SCS) for Micro-Electro/(Optical)-Mechanical-Systems (ME(O)MS). The ME(O)MS technology is very fast growing industry branch based often on the same silicon technology as integrated circuits. The process of plasma-dry etching is quite simple straightforward...

Deep Reactive Ion Etching (DRIE)

Explosive phase transformation in excimer laser ablation

This work investigated phase change mechanisms during excimer laser ablation of nickel specimens. Time-resolved measurements were carried out to determine optical properties and the velocity of the laser-ablated plume, the ablation rate per pulse, light scattering from the laser-ablated particles and the size of the laser-ablated particles, in the laser fluence range y2 y2 Ž y2 y2 . between 2.5...